JPH0180754U - - Google Patents
Info
- Publication number
- JPH0180754U JPH0180754U JP1987152538U JP15253887U JPH0180754U JP H0180754 U JPH0180754 U JP H0180754U JP 1987152538 U JP1987152538 U JP 1987152538U JP 15253887 U JP15253887 U JP 15253887U JP H0180754 U JPH0180754 U JP H0180754U
- Authority
- JP
- Japan
- Prior art keywords
- micro
- positioning mechanism
- electrode
- piezoelectric element
- detection probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987152538U JPH0743604Y2 (ja) | 1987-10-05 | 1987-10-05 | 圧電素子微小位置決め機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987152538U JPH0743604Y2 (ja) | 1987-10-05 | 1987-10-05 | 圧電素子微小位置決め機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0180754U true JPH0180754U (en]) | 1989-05-30 |
| JPH0743604Y2 JPH0743604Y2 (ja) | 1995-10-09 |
Family
ID=31427557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987152538U Expired - Lifetime JPH0743604Y2 (ja) | 1987-10-05 | 1987-10-05 | 圧電素子微小位置決め機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0743604Y2 (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62117379A (ja) * | 1985-11-16 | 1987-05-28 | Tohoku Metal Ind Ltd | 円筒型圧電アクチユエ−タ及びその製造方法 |
-
1987
- 1987-10-05 JP JP1987152538U patent/JPH0743604Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62117379A (ja) * | 1985-11-16 | 1987-05-28 | Tohoku Metal Ind Ltd | 円筒型圧電アクチユエ−タ及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0743604Y2 (ja) | 1995-10-09 |